• Home
  • About
  • Reports
    • EU commission 450mm Report (2012)
    • EEMI White Paper (2012)
    • 450mm SEMI EPWG Report – Japanese Version (2008)
    • 450mm SEMI EPWG Report – English Version (2008)
    • 450mm Wright Williams & Kelly
    • 300mm Intel
    • 200mm to 300mm SEMI / SEMATECH Report (1995)
    • 200mm JEIDA Report
  • Activities
    • Global 450mm Consortium
    • SEMI: Standards Status
    • ISMI
    • Europe: EEMI-450

CyberOptics Rolls Out 450 mm Line Metrology Sensors

April 06, 2010
by John
450mm, cyberoptics, Equipment, ismi, metrology, sensor, wafer
0 Comment

WILSONVILLE, OR, Apr 06, 2010 (MARKETWIRE via COMTEX) — The R&D group at CyberOptics Semiconductor has signed off on a line of wireless 450 mm wafer processing metrology sensors developed in conjunction with industry standards to help chipmakers and tool manufacturers qualify next-generation production processes.

CyberOptics’ 450 mm carbon fiber WaferSense(R) sensors are designed to obtain precise metrology data to optimize new processing equipment for shrinking 32 nm and 22 nm process tolerances, according to Craig C. Ramsey, Ph.D., CyberOptics Semiconductor’s general manager.

Ramsey said CyberOptics engineers have communicated with representatives of the International SEMATECH Manufacturing Initiative (ISMI) in developing the 450 mm devices for inclusion in ISMI’s 450 mm Interoperability Test Bed — where industry researchers have been studying 450 mm wafers and equipment. ISMI’s 450 mm roadmap calls for three chipmakers to build 450 mm pilot lines by 2012.

“The 450 roadmap is starting to heat up, and 32 nm tolerances will require equally tight metrology controls for viable processing,” Ramsey said.

CyberOptics’ 450 mm sensors allow engineers to level processing equipment, reduce equipment vibration and set three axis wafer-transfer coordinates. Each wafer-like device follows the processing life of a wafer and reports real-time metrology data via a GUI.

Related Posts

  • Do Suppliers need a Common Voice on 450mm?
  • Making 450mm Work for Foundries
  • ASML to Buy Cymer for $2.6 Billion to Boost Chip Technology: 450mm Implications
  • Blast from the Past: 300mm Expectations Video
  • Chip Companies Must Dig Deep for 450mm
Social Share
  • google-share

Leave a Reply Cancel reply

*
*

Search 450mm.com


Most Viewed Articles

  • Caution Ahead for 450mm? - 17,633 views
  • A Plan Coming Together: 450mm Patterned Wafers - 12,900 views
  • Schrödinger’s 450mm Cat – Dead or Alive? - 11,753 views
  • The 450mm Transition’s Dirty Little Secret - 11,417 views
  • 450mm Test Wafers, a Path Forward? - 11,011 views

Recent Comments

  • John Ellis on The 450mm Transition’s Dirty Little Secret
  • Tom Foremski on The 450mm Transition’s Dirty Little Secret
  • Israel Beinglass on The 450mm Transition’s Dirty Little Secret

450mm Industry News

  • Silicon Wafer Market Size 2021 Analysis, Growth, Vendors, Drivers, Challenges With Forecast To 2027 – NeighborWebSJ - NeighborWebSJ
  • Latest Update FOWLP Market trending report with future analysis and forecast by 2021-2026 - The Courier
  • Impact of Covid-19 on Semiconductor Silicon Wafer Market Trends, and Forecast 2020-2026 - Murphy's Hockey Law
  • Global Cold Plasma Market Future Prospects With Covid-19 Impact Analysis 2027 | Top Players-Plasmatreat GmbH, - openPR
  • Global FOUP Load Port Market to achieve Significant Growth | TDK, Brooks Automation, Kensington, MEIKIKOU, Genmark Automation (Nidec) - Jumbo News

Posts by Category

  • Analysis (9)
  • Commentary (21)
  • Cost / Benefit Discussion (23)
  • EDA (1)
  • Equipment (9)
  • Events (1)
  • General (18)
  • Government (10)
  • History (5)
  • In the Press (45)
  • Materials (4)
  • Standards (4)
  • Timing (20)
  • Uncategorized (1)
Copyright 2008 - 2017, Blue Mustang, LLC. All rights reserved.