SEMI M76-0710: Specification for 450 mm Diameter Mechanical Handling Polished Wafers
This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 30, 2010. Initially available at www.semi.org in June 2010, the developmental wafers covered by this specification are intended for use in research and development of process and metrology equipment and fabrication processes required for manufacturing high-density integrated circuits on 450 mm diameter single crystal silicon wafers. They can also be used to establish the techniques and metrology necessary to support a dimensional specification for 450 mm diameter circuit-quality (prime) wafers.
This specification covers dimensional and crystallographic orientation requirements for 450 mm diameter, polished single crystal silicon wafers needed in development. This document should be superseded by dimensional specification and technology-specific guidelines for circuit-quality wafers. A complete purchase specification requires that additional physical properties be specified along with test methods for determining their magnitude. If a test instrument is not available, the acceptance criteria should be agreed upon between supplier and customer.
This specification also contains guidance to assist equipment manufacturers and others to specify wafers for use in developing selected process equipment and unit processes. The specification for 450 mm diameter mechanical handling wafers used in development of 450 mm semiconductor equipment such as 450 mm wafers carriers, load ports, Automated Materials Handling System (AMHS), and robotics has already been published as SEMI M74. This specification is not intended to be a product wafer specification.
SEMI E158-0710: Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
The purpose of this document is to establish basic physical dimensions for the carriers intended to be used to transport and store 450 mm wafers, as specified by SEMI M74, within semiconductor device manufacturing facilities.
This document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers. This document is intended to define a set of requirements to ensure interoperability of load ports and carriers without limiting innovative solutions.
A complete update on Standards Status can be found at 450mm.info under Standards Update.